Ceramic coatings from the pyrolysis in ammonia of mixtures of silicate esters and other metal oxide precursors

摘要

Hydrolyzed or partially hydrolyzed mixtures of silicate esters and metal oxide precursors, are pyrolyzed at relatively low temperature in the presence of ammonia to form ceramic coatings on substrates such as electronic devices. The metal oxide precursors are soluble compounds, for example, alkoxides of aluminum, titanium or zirconium. The coatings produced are useful for the protection of electronic devices. One or more coatings containing amorphous silicon, silicon carbon, silicon nitrogen or silicon carbon nitrogen can be applied over the nitrided ceramic SiO₂/metal oxide coating for still further protection of electronic devices.