CERAMIC COATINGS FROM THE PYROLYSIS IN AMMONIA OF MIXTURES OF SILICATE ESTERS AND OTHER METAL OXIDE PRECURSORS

摘要

CERAMIC COATINGS FROM THE PYROLYSIS IN AMMONIA OF MIXTURESOF SILICATE ESTERS AND OTHER METAL OXIDE PRECURSORSABSTRACTHydrolyzed or partially hydrolyzed mixtures ofsilicate esters and metal oxide precursors, are pyrolyzed atrelatively low temperature in the presence of ammonia to formceramic coatings on substrates such as electronic devices.The metal oxide precursors are soluble compounds, forexample, alkoxides of aluminum, titanium or zirconium. Thecoatings produced are useful for the protection of electronicdevices. One or more coatings containing amorphous silicon,silicon carbon, silicon nitrogen or silicon carbon nitrogencan be applied over the nitrided ceramic SiO2/metal oxidecoating for still further protection of electronic devices.