Process for fabricating solar cells from amorphous silicon having enhanced sensitivity to blue

摘要

In order to enhance the sensitivity to blue and thus the efficiency of pin or nip solar cells made of amorphous, hydrogenised silicon on transparent substrates (1), the dopant carry-over due to the previously deposited p or n layer (3) is compensated for, during the deposition of the i layer (4) in the glow discharge plasma by a dopant of the opposite conductivity type. In the case of pin solar cells, the boron profile inevitably occurring in the i layer (4) is compensated for by a parallel phosphorus doping profile. IMAGE