Improvement of Blue Response in p-Type Hydrogenated Silicon Oxide Thin Film Prepared from (SiH4+B2H6+H2+N2O) Plasma in RF-PECVD for the Application of Amorphous Silicon Solar Cell

机译：RF-PECVD中由（SiH4 + B2H6 + H2 + N2O）等离子体制备的p型氢化氧化硅薄膜中的蓝响应的改善，以用于非晶硅太阳能电池

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Hydrogenated amorphous silicon oxide (a-SiOx:H) films have been used for solar cell fabrication[1,2] as their characteristics are suitable for wide band gap top cell of a multi-junction solar cell.

机译：氢化非晶硅氧化物（a-SiOx：H）薄膜已被用于太阳能电池的制造[1,2]，因为它们的特性适合于多结太阳能电池的宽带隙顶部电池。

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来源
《The 22nd International photovoltaic science and engineering conference》|2012年|1|共1页
会议地点 Hangzhou(CN)
作者
Chonghoon Shin; Junsin Yi; Jinjoo Park; Seungshin Baek; Juyeon Jang; Minbum Kim; Junhee Jung; S.M.Iftiquar; Younjung Lee; Sangho Kim;
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Department of Energy Science, Sungkyunkwan University, Suwon, 440-746, Korea;

Department of Energy Science, Sungkyunkwan University, Suwon, 440-746, Korea;

School of Electronic Electrical Engineering, College of Information and Communication Engineering, Sungkyunkwan University, Suwon, 440-746, Korea;

School of Electronic Electrical Engineering, College of Information and Communication Engineering, Sungkyunkwan University, Suwon, 440-746, Korea;

School of Electronic Electrical Engineering, College of Information and Communication Engineering, Sungkyunkwan University, Suwon, 440-746, Korea;

School of Electronic Electrical Engineering, College of Information and Communication Engineering, Sungkyunkwan University, Suwon, 440-746, Korea;

Department of Energy Science, Sungkyunkwan University, Suwon, 440-746, Korea;

Department of Energy Science, Sungkyunkwan University, Suwon, 440-746, Korea;

School of Electronic Electrical Engineering, College of Information and Communication Engineering, Sungkyunkwan University, Suwon, 440-746, Korea;

School of Electronic Electrical Engineering, College of Information and Communication Engineering, Sungkyunkwan University, Suwon, 440-746, Korea;

Department of Energy Science, Sungkyunkwan University, Suwon, 440-746, Korea;

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正文语种 eng
中图分类太阳能技术;
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专利

1. Analysis on the interfacial properties of transparent conducting oxide and hydrogenated p-type amorphous silicon carbide layers in p-i-n amorphous silicon thin film solar cell structure [J] . Ji Eun Lee, Joo Hyung Park, Jun-Sik Cho, Thin Solid Films . 2012,第18期

机译：p-i-n非晶硅薄膜太阳能电池结构中透明导电氧化物与氢化p型非晶碳化硅层的界面特性分析
2. P-Type hydrogenated silicon oxide thin film deposited near amorphous to microcrystalline phase transition and its application to solar cells [J] . Sriprapha K., Sitthiphol N., Sangkhawong P., Current applied physics: the official journal of the Korean Physical Society . 2011,第Suppla1期

机译：非晶态至微晶态相变附近沉积的P型氢化氧化硅薄膜及其在太阳能电池中的应用
3. Back-Surface-Field Effects at the Heterojunctions between Boron-Doped p-Type Hydrogenated Amorphous Silicon and Crystalline Silicon in Thin-Film Crystalline Silicon Solar Cells [J] . Isao SAKATA, Mitsuyuki YAMANAKA, Ryuichi SHIMOKAWA Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2005,第10期

机译：薄膜晶体硅太阳能电池中掺硼的p型氢化非晶硅和晶体硅之间异质结处的后场效应
4. Improvement of Blue Response in p-Type Hydrogenated Silicon Oxide Thin Film Prepared from (SiH4+B2H6+H2+N2O) Plasma in RF-PECVD for the Application of Amorphous Silicon Solar Cell [C] . Chonghoon Shin, Junsin Yi, Jinjoo Park, International photovoltaic science and engineering conference . 2012

机译：在RF-PECVD中制备的（SIH4 + B2H6 + H2 + N 2 O）等离子体在RF-PECVD中制备的P型氢化氧化硅薄膜蓝响应的改进，以应用非晶硅太阳能电池
5. Thin film silicon by a microwave plasma deposition technique: Growth and devices, and, interface effects in amorphous silicon/crystalline silicon solar cells. [D] . Jagannathan, Basanth. 1998

机译：通过微波等离子体沉积技术的薄膜硅：非晶硅/晶体硅太阳能电池中的生长和器件以及界面效应。
6. Role of SiNx Barrier Layer on the Performances of Polyimide Ga2O3-doped ZnO p-i-n Hydrogenated Amorphous Silicon Thin Film Solar Cells [O] . Fang-Hsing Wang, Hsin-Hui Kuo, Cheng-Fu Yang, 2014

机译：SiNx阻挡层对聚酰亚胺Ga2O3掺杂的ZnO p-i-n氢化非晶硅薄膜太阳能电池性能的影响
7. Effect of Oxygen and Diborane Gas Ratio on P-type Amorphous Silicon Oxide films and Its Application to Amorphous Silicon Solar Cells [O] . Jinjoo Park, Youngkuk Kim, Sunwha Lee, 2012

机译：氧，乙硼烷气体比对P型非晶硅薄膜的影响及其在非晶硅太阳能电池中的应用
8. Preparation and Characterization of Hydrogenated Amorphous Silicon Thin Films and Thin Film Solar Cells Produced by Ion Plating Techniques. Final Report, 1 January 1979-31 May 1980 [R] . 1980

机译：离子镀技术制备氢化非晶硅薄膜和薄膜太阳能电池的制备与表征。最终报告，1979年1月1日至1980年5月31日

Improvement of Blue Response in p-Type Hydrogenated Silicon Oxide Thin Film Prepared from (SiH4+B2H6+H2+N2O) Plasma in RF-PECVD for the Application of Amorphous Silicon Solar Cell

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