Improvements to the capacitive sensors differential for sensor gas leak

摘要

The invention relates to a differential capacitive sensor. The sensor comprises two identical metal electrodes 40, 42, each embedded over its entire thickness with the exception of one of its faces 48, 50, which remains free inside a flange 44, 46 provided with a flat annular rim which protrudes slightly with respect to the plane of the free face of the electrode, the two flanges being joined solidly by clamping, between their annular rims, a deformable metal diaphragm 52, the said diaphragm forming with each of the electrodes a chamber 58, 60. The channel 76 emerges in the base of an annular groove 68, 70 formed at the periphery of the free face of each electrode, is contained in a plane tangential to the groove, and is inclined with respect to the plane of the latter. IMAGE