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Process for making diamond, doped diamond, diamond-cubic boron nitride composite films
Process for making diamond, doped diamond, diamond-cubic boron nitride composite films
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机译:金刚石,掺杂金刚石,金刚石立方氮化硼复合膜的制备方法
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摘要
A process and apparatus that may be used for the production of diamond and doped diamond films at high rates by activated reactive vapor deposition. Carbon is evaporated in a vacuum chamber in the presence of atomic hydrogen containing plasma to form diamond precursors which then deposit on a substrate located within the vacuum chamber.
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