AUTOMATIC QUALITATIVE ANALYSIS METHOD BASED ON SPECTRAL DATA

摘要

PURPOSE:To identify existing elements automatically without comparing an energy level corresponding to the peak of spectrums with a standard spectrum table by projecting a charged particle beam on a sample, separating charged electrons generated by said projection in correspondence with energy or mass, detecting a signal, and performing qualitative analysis of the sample based on the signal. CONSTITUTION:An electron EB is projected on a sample 3. Generated Auger electrons AE are separated in correspondence with energy with a spectroscope 4. A signal which is detected with a detector 5 is supplied to an AD converter 7 through an amplifier 6. The converted signal undergoes automatic qualitative analysis in a central processing unit 8. The result is stored in a memory device 9. The result is displayed on a spectrum display device 10. The background is removed from the processed signal in the CPU 8, and the peak is taken out. The position of the peak is obtained. Element-name data are read out of a table 11 wherein the element-name data corresponding to the position are stored. Whether the data correspond to the rank of the noted peak or not is judged.