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MANUFACTURE OF METAL-FILM RESISTOR

机译:金属膜电阻器的制造

摘要

PURPOSE:To obtain a metal-film resistor whose accuracy is high and in which a deterioration in a characteristic is small by a method wherein a resistance film layer is sandwiched between alumina layers which have been formed by a vapor-deposition operation, a sputtering operation or the like. CONSTITUTION:This resistor is composed of the following: an alumina base 1; an alumina lower-layer protective film 2 which has been formed by a high-frequency sputtering system; an N-Cr resistor 3 which has been formed by a sputtering system; an alumina upper-layer protective film 4 which has been formed by the sputtering system; an insulating protective film 5 by a paint; a metal electrode 6. When the metal film resistor 3 is sandwiched between the alumina protective film layers 2, 4 in this manner, it is possible to obtain a metal film resistor in which a deterioration in a characteristic of the resistor 3 is small and whose accuracy and reliability are high.
机译:用途:通过将电阻膜层夹在通过气相沉积操作形成的氧化铝层之间的方法,可获得精度高且特性劣化小的金属膜电阻器等等。组成:该电阻器由以下部分组成:氧化铝基1;通过高频溅射法形成的氧化铝下层保护膜2。通过溅射系统形成的N-Cr电阻3。通过溅射系统形成的氧化铝上层保护膜4。用涂料绝缘保护膜5;这样,通过将金属膜电阻器3夹在氧化铝保护膜层2、4之间,可以得到电阻器3的特性下降少且金属膜电阻器3的特性降低的金属膜电阻器。准确性和可靠性高。

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