SCANNING TYPE TUNNEL CURRENT DETECTOR, SCANNING TYPE TUNNEL MICROSCOPE, RECORDING AND REPRODUCING DEVICE, AND DETECTING METHOD OF TUNNEL CURRENT

摘要

PURPOSE:To eliminate the influence of the temperature drift and to improve the measuring accuracy by giving a function to measure the distance variation between a holding board and a sample medium, and to compensate the distance variation, to one probe electrode, while making another probe electrode into a current detecting electrode. CONSTITUTION:The whole body of a scanning type tunnel microscope which has a variation compensating function is loaded on a variation-preventive board 101 which has a large mass, and the high-frequency component of the vibration received from an external disturbance is removed. And, the relative positions of a tip for position control (probe electrode) 109, a tip for observation (probe electrode) 111, and a conductive sample 108 are determined as desired, in the X, Y directions on the surface by an X, Y stage 102, and in the height Z direction by a rough movement mechanism 103. And the tip 111 can sweep in the direction inside the surface by maintaining the tunnel current constant with a cylindrical piezo element 112 for observation. And the tip 109 measures the variation of the distance between a piezo element holding member 116 and the piezo element 112, a variation compensation minute movement mechanism 105 is controlled by a position control servo circuit 106, and the variation is compensated.