ROLL-TYPE STAMPER FOR 2P AND PRODUCTION THEREOF

摘要

PURPOSE:To produce a roll-type stamper for 2P which is easy to transmit ultraviolet rays and excellent in transferring properties of a group of track in a simple stage at low cost by applying a resist to extremely thin glass transmitting ultraviolet rays, patterning and etching it and bonding the formed paper- shaped glass-stamper on the outer circumferential wall of the cylindrical base material made of ultraviolet transmittable glass via an adhesive. CONSTITUTION:A resist pattern 4 is formed by applying a photoresist to a transparent base plate 3 made of polished extremely thin quarts glass and exposing it while utilizing a mask having a prescribed pattern and developing it. Thereafter the paper-shaped glass-stamper 1 having the prescribed pattern is formed on the transparent base plate 3 by etching the resist pattern. This glass-stamper 1 is wound on the outer circumferential wall of a cylindrical base material 2 made of ultraviolet transmittable glass via an adhesive. A thermally shrinkable tube which is shrunk at the temp. lower than the curing temp. of the adhesive is closely stuck on the outside thereof and coated and thereafter heated. Then the temp. is raised to cure the adhesive and the thermally shrinkable tube is detached to obtain the roll-type stamper for 2P.