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Three plate, silicon-glass-silicon capacitive pressure transducer
Three plate, silicon-glass-silicon capacitive pressure transducer
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机译:三板式硅玻璃硅电容式压力传感器
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摘要
A three plate silicon-glass-silicon capacitive pressure transducer includes a conductive silicon diaphragm and substrate relatively spaced by a dielectric body having disposed therein a central electrode positioned between the diaphragm and substrate to form a pressure responsive capacitance with the diaphragm at a value inversely proportional to a pressure signal applied to a pressure sensing surface of the diaphragm.
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