A METHOD OF MANUFACTURING PEROVSKITE LEAD SCANDIUM TANTALATE

摘要

The process described, which is used to manufacture perovskite lead scandium tantalate, consists in pre-reacting scandium and tantalum oxides at temperatures between 1000 ° C and 1400 ° C to produce tantalate scandium. The scandium tantalate is then reacted with lead oxide to form the desired perovskite lead scandium tantalate. In one embodiment, the present invention describes a method of depositing perovskite lead scandium tantalate films from organometallic precursors. The possibility of using organometallic precursors allows the deposition of thin layers directly from a solution or by MOCVD techniques (gas phase deposition by chemical process of organometallic type). One such material, lead scandium tantalate Pb (Sc0.5Ta0.5) O3, is particularly described. The main features of the present invention are the deposition of constituents of scandium and tantalum from a solution or by MOCVD on the required substrate. These constituents are then pre-reacted to produce scandium tantalate. A film or vapor containing lead is then reacted with scandium tantalate to form scandium tantalate in the perovskite phase.