METHOD OF MANUFACTURING SELF-SUPPORTING THIN PEROVSKITE LEAD SCANDIUM TANTALATE FILM

摘要

PURPOSE: To easily obtain a free standing perovskite lead scandium tantalate film by depositing an oxidized magnesium layer on a base body, forming the film of lead scandium tantalate, etching the oxidized magnesium layer so as to remove it after that. ;CONSTITUTION: The film of lead scandium tantalate film is formed on the oxidized magnesium layer which is deposited on the sapphire or gadolinium- gallium-garnet(GGG) base material. Then, the oxidized magnesium layer is etched so as to release a lead scandium tantalate film. It is preferable that an MgO layer is formed by ≤1 μm thickness by sputtering from an MgO target. The etching of the MgO layer is executed by using phosphoric acid or hydrochloric acid.;COPYRIGHT: (C)1992,JPO