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METHOD OF ROENTGENOSTRUCTURAL ANALYSIS OF THIN FILMS
METHOD OF ROENTGENOSTRUCTURAL ANALYSIS OF THIN FILMS
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机译:薄膜的薄膜相变分析方法
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摘要
the invention u043eu0442u043du043eu0441u0438u0442u0441u00a0 means u0440u0435u043du0442u0433u0435u043du043eu0433u0440u0430u0444u0438u0447u0435u0441u043au043eu0433u043e u043au043eu043du0442u0440u043eu043bu00a0 materials can, in particular, in the study u0438u0441u043fu043eu043bu044cu0437u043eu0432u0430u0442u044cu0441u00a0 thin-film materials. the purpose is to improve the u0438u0437u043eu0431u0440u0435u0442u0435u043du0438u00a0 u0440u0430u0437u0440u0435u0448u0435u043du0438u00a0 and contrast u0434u0438u0444u0440u0430u043au0446u0438u043eu043du043du043eu0439 paintings.u0434u043bu00a0 u043eu0441u0443u0449u0435u0441u0442u0432u043bu0435u043du0438u00a0 mode beam of x-rays coming from the source 3 through the slit 4, and is u043cu043eu043du043eu0445u0440u043eu043cu0430u0442u043eu0440u0430 system 5 so as to obtain the u043fu0440u00a0u043cu043eu0443u0433u043eu043bu044cu043du0443u044e form his u0441u0435u0447u0435u043du0438u00a0 on the surface of the object 2, the angle to the equatorial plane. the beam forms with the surface angle, determined depending on the thickness of the controlled u0441u043bu043eu00a0.the rotation of the sample around the axis of the goniometer 6 u043eu0441u0443u0449u0435u0441u0442u0432u043bu00a0u044eu0442 registration u0434u0438u0444u0440u0430u043au0446u0438u043eu043du043du043eu0439 paintings from u043au0440u0438u0441u0442u0430u043bu043bu043eu0433u0440u0430u0444u0438u0447u0435u0441u043au0438u0445 planes with an angle of 90 u0441u043eu0441u0442u0430u0432u043bu00a0u044eu0449u0438u0445 -. 1 il.
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