METHOD OF MEASURING GEOMETRIC PARAMETERS OF SURFACE IN INTERFERENCE PROFILOGRAPH OF WHITE LIGHT

摘要

the invention u043eu0442u043du043eu0441u0438u0442u0441u00a0 to the instrumentation technique. the purpose of u0438u0437u043eu0431u0440u0435u0442u0435u043du0438u00a0 - to reduce the time and improve the accuracy of measurement by u0444u043eu0440u043cu0438u0440u043eu0432u0430u043du0438u00a0 more accurate assessments of u0438u0437u043cu0435u0440u00a0u0435u043cu043eu0433u043e parameter for the computation of average.method of tuning u0437u0430u043au043bu044eu0447u0430u0435u0442u0441u00a0 in shaping the signal proportional to the difference of the change of status of u0430u044du0440u043eu043cu0430u0442u0438u0447u0435u0441u043au043eu0439, u0438u043du0442u0435u0440u0444u0435u0440u0438u0440u0443u044eu0449u0438u0445 rays in the bride's side. well u0443u043cu0435u043du044cu0448u0435u043du0438u00a0 signal of tuning, the comparison signal of tuning with a permissible error u0438u0437u043cu0435u0440u0435u043du0438u00a0, making the signal of tuning signal proportional to the difference of the iue, and u0443u0441u0440u0435u0434u043du0435u043du0438u0438 the summary values.u0434u043bu00a0 signal of tuning is less than the permissible error. 1 il.