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Method and apparatus for changing the imaging scale in X-ray lithograph
Method and apparatus for changing the imaging scale in X-ray lithograph
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机译:X射线光刻机中改变成像比例的方法和装置
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摘要
Am improved method for changing the image scale for a lithographic arrangement comprising a synchroton radiation creating a collimated beam of x-radiation passing through a mask onto an object to be structured, characterized by deforming the surface to be structured into a curved surface. The deforming into a curved surface can be either into a cylindrical curved surface or into a spherical curved surface.
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