NI-TI SERIES SHAPE MEMORY ALLOY THIN FILM AND ITS MANUFACTURE

摘要

PURPOSE:To obtain the shape memory alloy thin film having a prescribed compsn. and transformation temp. by using an Ni-Ti series alloy in which the precipitates of Ti2Ni are uniformly dispersed as a target material and regulating its film thickness into a prescribed one by a sputtering method. CONSTITUTION:An Ni-Ti series shape memory alloy in which the precipitates of Ti2Ni are uniformly dispersed and constituted of, by weight, 44 to 50% Ni and the balance Ti is used as a target material. By using the target material, a thin film is formed on a substrate by a sputtering method. Then, the Ni-Ti series shape memory alloy thin film constituted of 49 to 51.5% Ni and the balance Ti and having 1mum to 1mm film thickness can be obtd.