REFLECTING MIRROR OF MULTILAYERED FILM, HALF MIRROR AND BEAM SPLITTER FOR SOFT X-RAY AND VACUUM ULTRAVIOLET RAY

摘要

PURPOSE:To obviate the generation of deterioration by interlayer thermal diffusion, etc., with high-intensity soft X-rays and vacuum UV rays by alternately laminating two kinds of refractive indices different from each other which are light elements of =20 atomic number or the compds. of these light elements and thereby forming a multi-layered structure. CONSTITUTION:The light elements of =20 atomic number or the compds. of these light elements are used for both of two kinds of the materials of the reflecting mirror of the multi-layered films for the soft X-rays and vacuum UV rays having the multi- layered structure consisting of the alternate layers of two kinds of the materials which are different in refractive index from each other. The layers 2, 4... of the 1st material and the layers 3, 5... of the 2nd material are alternately laminated on a substrate 1 having the surface polished sufficiently smoothly as compared to the wavelengths to be used to constitute the reflecting mirror. Two kinds of the materials are both used by selectively combining Be, B, C, Al, Si, BeO, Be2C, B4C, BN, B6Si, MgF2, MgO, Mg2Si, AlF3, AlB2, Al2O3... etc., in such a manner that the refractive indices vary from each other. The difference in the refractive index is preferably =0.01 in the case of 100 number of layers.