METHOD FOR GROWING SINGLE CRYSTAL OF INORGANIC COMPOUND AND BOAT FOR GROWING SINGLE CRYSTAL

摘要

PURPOSE:To grow a large-sized single crystal in high yield when a single crystal of an inorg. cmpound is grown from a group IIIb element and a group Vb element in the periodic table by a boat growing method, by using a quartz boat after forming a tridymite layer on the surface and roughening the inside. CONSTITUTION:A quartz boat is roughened by sand blast with powder of SiC, Al2O3 or the like. After cleaning the surface by pickling and washing, the boat is dried and heated at about 380-1,450 deg.C for = about 1hr in an electric furnace to form a tridymite layer to such a degree that quartz is not exposed to the surface. A single crystal of a group III-V compound is manufactured by using the resulting boat.