METHOD FOR MEASURING THE THICKNESS OF METAL PLATING ON DIELECTRIC SUBSTRATES AND SENSOR THEREOF

摘要

the invention u043eu0442u043du043eu0441u0438u0442u0441u00a0 to the instrumentation technology, in particular to methods and devices for u0434u0438u044du043bu0435u043au0442u0440u0438u0447u0435u0441u043au0443u044e u0434u043bu00a0 u0438u0437u043cu0435u0440u0435u043du0438u00a0 thickness on substrate u043fu043eu043au0440u044bu0442u0438u00a0 of metal, and can be u0433u044c used primarily in the production process of semiconductor devices and the devices on the solid body. purpose u0438u0437u043eu0431u0440u0435u0442u0435u043du0438u00a0 u00a0u0432u043bu00a0u0435u0442u0441u00a0 improved accuracy and coverage measurements.a thickness of the metal u0438u0437u043cu0435u0440u0435u043du0438u00a0 u043fu043eu043au0440u044bu0442u0438u00a0 u0437u0430u043au043bu044eu0447u0430u0435u0442u0441u00a0 is u0438u0437u043cu0435u0440u00a0u0435u043cu043eu0435 cover placed in a magnetic u043fu043eu043bu00a0 surface electromagnetic field waves of a certain length, u0438u0437u043cu0435u0440u00a0u044eu0442 u0432u0440u0435u043cu00a0 u0437u0430u043fu0430u0437u0434u044bu0432u0430u043du0438u00a0 phase of these waves in the stretch u0437u0430u043cu0435u0434u043bu00a0u044eu0449u0435u0439 structure and on the basis of the measured values of the u0441u0443u0434u00a0u0442 of u043cu0435u0440u00a0u0435u043cu043eu0439 and u0432u043bu0438u00a0u044eu0449u0438u0445 values.the sensitive element u0434u043bu00a0 u043eu0441u0443u0449u0435u0441u0442u0432u043bu0435u043du0438u00a0 method contains u0434u0438u044du043bu0435u043au0442u0440u0438u0447u0435u0441u043au0443u044e plate on the opposite u043fu043eu0432u0435u0440u0445u043du043eu0441u0442u00a0u0445 which against each other with the two eid u0435u043du0442u0438u0447u043du044bu0445 metal u043fu043eu043au0440u044bu0442u0438u00a0 in the form of a spiral. improving the accuracy of u0438u0437u043cu0435u0440u0435u043du0438u00a0 u0434u043eu0441u0442u0438u0433u0430u0435u0442u0441u00a0 information u0432u043bu0438u00a0u044eu0449u0438u0445 values and the correction of their u0437u043du0430u0447u0435u043du0438u00a0. 2 u0441.u0438 2 u0437.u043f s - lu, 2). (l, c