首页>
外国专利>
ETCHING SOLUTION FOR IRON-YTTRIUM GARNET EPITAXIAL FILMS
ETCHING SOLUTION FOR IRON-YTTRIUM GARNET EPITAXIAL FILMS
展开▼
机译:铁钇石榴石外延膜的蚀刻解决方案
展开▼
页面导航
摘要
著录项
相似文献
摘要
the invention u043eu0442u043du043eu0441u0438u0442u0441u00a0 chemical u0441u043eu0435u0434u0438u043du0435u043du0438u00a0u043c and is u0434u043bu00a0 precision u0442u0440u0430u0432u043bu0435u043du0438u00a0 u044du043fu0438u0442u0430u043au0441u0438u0430u043bu044cu043du044bu0445 films based on u0436u0435u043bu0435u0437u043eu0438u0442u0442u0440u0438u0435u0432u043eu0433u043e grenade. produced by u0442u0440u0430u0432u043bu0435u043du0438u00a0 of data of elements necessary configuration u0438u0441u043fu043eu043bu044cu0437u0443u044eu0442u0441u00a0 devices of radio engineering, such as u0433u0438u0440u043eu043cu0430u0433u043du0438u0442u043du044bu0435 u0444u0438u043fu044cu0442u0440u044b, l u0438u043du0438u0438 delay and so on.to increase the speed u0438u0437u043eu0431u0440u0435u0442u0435u043du0438u00a0 u00a0u0432u043bu00a0u0435u0442u0441u00a0 u0442u0440u0430u0432u043bu0435u043du0438u00a0 while ensuring a high quality of u0432u044bu0442u0440u0430u0432u043bu0438u0432u0430u0435u043cu044bu0445 elements selectively. u0434u043bu00a0 u0434u043eu0441u0442u0438u0436u0435u043du0438u00a0 goal u0438u0441u043fu043eu043bu044cu0437u0443u0435u0442u0441u00a0 tra - representative, containing the concentrated nitric acid and u043eu0440u0442u043eu0444u043eu0441u0444u043eu0440u043du0443u044e acid in the ratio of 5 and 95 mas.%, respectively. pickling u043fu0440u043eu0432u043eu0434u0438u0442u0441u00a0 at a temperature of about 175 & deg;.at this temperature u0430u0437u043eu0442u043du0430u00a0 acid u0440u0430u0437u043bu0430u0433u0430u0435u0442u0441u00a0 into nitrogen dioxide, thus increasing the speed of u0442u0440u0430u0432u043bu0435u043du0438u00a0 u044du043fu0438u0442u0430u043au0441u0438u0430u043bu044cu043du044bu0445 film thickness of 20 m km to 3 to 4 microns / min). when the concentration of nitric acid u0442u0440u0430u0432u043bu0435u043du0438u00a0 speed increases even more, but the quality is u0443u0445u0443u0434u0448u0430u0442u044cu0441u00a0 borders u0432u044bu0442u0440u0430u0432u043bu0438u0432u0430u0435u043cu044bu0445 ale u0435u043du0442u043eu0432.
展开▼