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Rapid spectral analysis of recurring signal - by detecting, modulation and mixing of sec. signal caused by exposing integrated circuit to prim. beam
Rapid spectral analysis of recurring signal - by detecting, modulation and mixing of sec. signal caused by exposing integrated circuit to prim. beam
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机译:重复信号的快速频谱分析-通过检测,调制和混合秒。集成电路暴露于启动时引起的信号。光束
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摘要
The rapid spectral analysis of a repeating signal at at least one point on a specimen (IC) involves exposing the specimen to a primary beam (PE) and deriving a secondary signal (SS) resulting from the interaction between the beam and specimen. The primary beam, secondary beam, secondary partic. flow (SE), or secondary signal processing device is modulated by a modulation freq.. Part of the spectrum of the repeating signal in the secondary signal is mixed into a lower intermediate freq. plane and the secondary signal is ubjected to spectral analysis. USE/ADVANTAGE - Simple, cost-effective spectral signal analysis for functionally testing highly integrated circuits.
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