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Method of preparation, by cathodic sputtering, thin films of a multilayer magnetic substance and silver, with the pharmacological magnetic and / or magneto - optic improved
Method of preparation, by cathodic sputtering, thin films of a multilayer magnetic substance and silver, with the pharmacological magnetic and / or magneto - optic improved
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机译:通过阴极溅射制备多层磁性物质和银的薄膜的方法,其药理磁性和/或磁光
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摘要
Method of preparation of multilayer thin films of a Fe, Co, Ni magnetic substance and their alloys, consisting in depositing the thin films by RF cathode sputtering, for the magnetic substance, with a deposition rate of 2-3 nm/min, and by RF-magnetron cathode sputtering for the silver, with a deposition rate of 6-10 nm/min. The multilayer thin films thus obtained have improved magnetic and/or magneto optical properties, compared to the properties of the magnetic substance. They can be used as a magnetic material in devices using magnetic and/or magneto-optical effects.
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