IMPROVING STEP COVERAGE OF A METALLIZATION LAYER ON AN INTERGRATED CIRCUIT BY USE OF A HIGH MELTING POINT METAL AS AN ANTIREFLECTIVE COATING

• 1. 提供改善的耐划伤性的抗反射涂层组合物、使用该组合物的抗反射膜及其制造方法 [P] . 中国专利： CN103842455B . 2016.08.17
• 2. 提供改善的耐划伤性的抗反射涂层组合物、使用该组合物的抗反射膜及其制造方法 [P] . 中国专利： CN103842455A . 2014-06-04
• 3. Method for improving step coverage of a metallization layer on an integrated circuit by use of a high melting point metal as an anti- reflective coating during laser planarization [P] . 美国专利： US5032233A . 1991-07-16

  机译： 在激光平坦化过程中通过使用高熔点金属作为抗反射涂层来改善集成电路上金属化层的阶梯覆盖的方法

• 4. METHOD OF IMPROVING STEP COVERAGE OF METALLIC COATED LAYER ON INTEGRATED CIRCUIT BY USAGE OF HIGH MELTING-POINT METAL AS ANTIREFLECTION FILM AT TIME OF LASER FLATTENING [P] . 日本专利： JPH04245457A . 1992-09-02

  机译： 利用激光熔断时高熔点金属作为抗反射膜来改善整体电路上金属涂层的覆盖率的方法

• 5. Method for improving step coverage of a metallization layer on an integrated circuit by use of molybdenum as an anti-reflective coating [P] . 美国专利： US5066611A . 1991-11-19

  机译： 通过使用钼作为抗反射涂层来改善集成电路上金属化层的阶梯覆盖的方法

• 1. Partial Transient Liquid Phase Metals Layer-Surface Coating for Improved Oxidation Resistance and Low Cycle Fatigue Crack Initiation Life at 1073K in Air of TiAl Alloy [C] . Y.Iino International conference on fracture and damage mechanics . 2014
• 2. Hollow glass waveguides with multilayer polystyrene and metal sulfide thin film coatings for improved infrared transmission. [D] . Johnson, Valencia S. 2007
• 3. Improved Morphological and Localized Surface Plasmon Resonance (LSPR) Properties of Fully Alloyed Bimetallic AgPt and Monometallic Pt NPs Via the One-Step Solid-State Dewetting (SSD) of the Ag/Pt Bilayers [O] . Sundar Kunwar, Puran Pandey, Sanchaya Pandit, 2019
• 4. Improved adhesion of superhydrophobic layer on metal surfaces via one step spraying method [O] . Wael I. El Dessouky, Rafik Abbas, Wagih A. Sadik, 2017

• 1. Metal Nano Layer Coating for Improving the Detection and Recognition of Micro-Poisons Using Reflection Spectroscopic Measurement [J] . Amir Abramovich ,Alexander Shulzinger ,Meir Ochana . 光学与光子学期刊（英文） . 2015,第5期
• 2. Finite Element Analysis of Ceramic Coatings under Spherical Indentation with Metallic Interlayer: PartⅠUncracked Coatings [J] . Minh-Quy LE ,Seock-Sam KIM . 材料科学技术：英文版 . 2006,第4期
• 3. Element Analysis of Ceramic Coatings under Spherical Indentation with Metallic Interlayer: PartⅡRing Crack [J] . Minh-Quy LE ,Seock-Sam KIM . 材料科学技术：英文版 . 2006,第5期
• 4. MEASUREMENT OF INTERNAL STRESSES OF METAL MULTILAYER COMPOSITE COATINGS [J] . 顾卓明 . 武汉理工大学学报：材料科学英文版 . 1997,第Z1期
• 5. Identification of Phases in Aluminide Coatings by Means of Interference Layer Metallography [J] . 吴维叟 . 材料科学技术：英文版 . 1989,第5期
• 6. 集成电路金属化抗过电应力能力研究 [C] . 桂翔 . 1987年电子产品可靠性与质量管理学会第四届学术年会 . 1987
• 7. 集成电路铜金属化中的Mo基扩散阻挡层研究 [A] . 宋双喜 . 2005