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Method and apparatus for focus error compensation having path length independence

机译:具有路径长度独立性的聚焦误差补偿的方法和装置

摘要

A method and apparatus for generating a focus error signal from a beam of light reflected from an optical surface, is shown to include a beamsplitter for splitting the reflected light beam into first and second beams, first and second detectors for generating first and second detection signals representative of light on said detectors, a first lens having a first focal length for focusing the first beam at a first focal point, wherein the first detector is positioned in the convergent portion of the focused first beam so that the ratio of the distance of the first detector from the first lens to the first focal length is a first value, a second lens having a second focal length, different from the first focal length for focusing the second beam at a second focal point, wherein the second detector is positioned in the convergent portion of the focused second beam so that the ratio of the distance of the second detector from the second lens to the second focal length is a second value equal to the first value, and a differencing circuit for subtracting the signals generated by the first and second detectors thereby generating a focus error signal. Such apparatus and method has excellent rejection of beam pattern noise, i.e., spatial variations of optical power unrelated to the state of focus of the beam and is suitable for incorporation in a split optics information system.
机译:示出了一种用于从从光学表面反射的光束中产生聚焦误差信号的方法和设备,包括:用于将反射光束分成第一光束和第二光束的分束器,用于产生第一检测信号和第二检测信号的第一检测器和第二检测器。代表所述检测器上的光的第一透镜具有第一焦距,用于将第一光束聚焦在第一焦点上,其中第一检测器位于聚焦的第一光束的会聚部分中,使得从第一透镜到第一焦距的第一检测器是第一值,第二透镜具有不同于第一焦距的第二焦距,用于将第二光束聚焦在第二焦点上,其中第二检测器位于聚焦的第二光束的会聚部分,以使第二检测器从第二透镜到第二焦距的距离之比为第二值eq差分电路用于将第一检测器和第二检测器产生的信号相减,从而产生聚焦误差信号。这样的设备和方法具有极好的对光束图案噪声的抑制,即与光束的聚焦状态无关的光功率的空间变化,并且适合于结合在分离光学信息系统中。

著录项

  • 公开/公告号US5001333A

    专利类型

  • 公开/公告日1991-03-19

    原文格式PDF

  • 申请/专利权人 HEWLETT-PACKARD COMPANY;

    申请/专利号US19890427288

  • 发明设计人 DANIEL R. MARSHALL;

    申请日1989-10-24

  • 分类号G01J1/20;

  • 国家 US

  • 入库时间 2022-08-22 05:46:45

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