INTEGRATED CIRCUIT STRUCTURE BODY PROVIDED WITH SELF-INSPECTION FUNCTION; SORTING METHOD OF GOOD INTEGRATED CIRCUIT CHIP BY USING IT

摘要

PURPOSE:To surely judge, in a nondestructive manner, whether integrated circuit chips for an operating frequency which by far exceeds conventional operating frequencies such as Josephson integrated circuit chips or the like are good or not by a method wherein an integrated circuit under test and a test circuit are juxtaposed in different regions which are situated on the same board and which can be divided. CONSTITUTION:An integrated circuit 31 under test which is subjected to the judgment of whether it is good or not and a test circuit 32 which tests the integrated circuit 31 under test and which extracts a test data are juxtaposed in different regions 21, 22 which are situated on the same board 21 and which can be divided. Bonding pads 35 for test use which are required to connect the test circuit 32 to an external analysis apparatus are provided only in the region 22 which is situated on said board 20 and in which the test circuit 32 is formed. For example, a Josephson integrated circuit 31 under test is formed in a first region 21 of a board 20; a Josephson test circuit 32 which performs the operation test of the Josephson integrated circuit 31 under test and which extracts a test data is formed in a second region 22. The Josephson test circuit 32 is connected to the Josephson integrated circuit 31 under test by using interconnections 33 on the board 20.