ACTUATOR PROVIDED WITH LIQUID PRESSURE DISPLACEMENT ENLARGING MECHANISM

摘要

PURPOSE:To simplity a process and improve accuracy of an actuator by arranging an O ring under initial compression-load applied between the end face of a driving piston and the inside end face of the body so as to tightly seal a space between the driving piston and the body. CONSTITUTION:An O ring 20 of sectional dimension determined to receive compression load initially is interposed between the upper face of a driving piston 2 and the inside the end face of a body 1. Processes such as machining an O ring groove and soldering of a diaphragm and the like are unnecessary without disturbing free deformation of a piezoelectric actuator 3, and manufacturing cost is decreased accuracy of the actuator 3 is improved.