METHOD FOR COATING POLYCRYSTALLINE DIAMOND FILM AND POLYCRYSTALLINE DIAMOND COATED CERAMIC BASE MATERIAL

摘要

PURPOSE:To generate a large number of diamond nuclei and to coat a base material with a polycrystalline diamond film having superior adhesive strength to the substrate by machining the surface of the base material based on nonoxide ceramic in prescribed conditions and coating the machined surface with a polycrystalline diamond film with a specified method. CONSTITUTION:The surface of a base material composed of nonoxide ceramic such as Si3N4 mainly is machined so as to obtain 0.25-2.0mu surface roughness Rmax and the machined surface is coated with the polycrystalline diamond film by vapor phase synthesis.