CARRIER FOR TRANSPORTING BASE PLATE FOR SPUTTERING

摘要

PURPOSE:To perform film formation on a base plate by sputtering with good yield by fitting the holder of the base plate to a carrier main body via an insulated member and electrically floating this holder from earth potential to hold it. CONSTITUTION:A carrier main body 1 is driven along tracks 5 by utilizing wheels 4. The holder 3 of a base plate is stuck to the carrier main body 1. Film formation is performed by sputtering on the nonconductive base plate 8 stuck on the holder 3 thereof. Therein, the holder 3 is fitted to the carrier main body 1 via an insulated member 2 high in dielectric strength properties and held by electrically floating the holder from earth potential. The insulated member 2 is constituted as at least one part of the carrier main body 1 and also constituted as one part of the holder of the base plate. Thereby, when a nonmetallic film is formed on the nonconductive base plate by sputtering, the base plate is prevent from being damaged by discharge of electrified charged particles.