METHOD AND APPARATUS FOR FABRICATION OF MICRO-STRUCTURES USING NON-PLANAR, EXPOSURE BEAM LITHOGRAPHY

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  机译： 使用非平面曝光束光刻技术制造微结构的方法和装置

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  机译： 使用非平面曝光束光刻技术制造微结构的方法和设备

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  机译： 使用非平面曝光束光刻技术制造微结构的方法和设备

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• 3. Fabrication of Anti-reflecting Si Nano-structures with Low Aspect Ratio by Nano-sphere Lithography Technique [J] . Shenghua Sun, Peng Lu, Jun Xu, 纳微快报：英文版 . 2013,第001期
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• 1. Fabrication of two-dimensional periodic TiO2 pillar arrays by multi-beam laser interference lithography [J] . Hiroyo Segawa ,Hiroaki Misawa . 自然科学期刊（英文） . 2009,第3期
• 2. Lithography and Fabrication of Frictional Tiers on Poly(Dimethylsiloxane) Using Atomic Force Microscopy [J] . Gregory S. Watson ,Jolanta A. Watson . 表面工程材料与先进技术期刊（英文） . 2012,第3期
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