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DEVICE FOR RADIO FREQUENCY POWERED GLOW DISCHARGE SPECTROMETRY WITH EXTERNAL SAMPLE MOUNT GEOMETRY

机译:带有外部样品座几何形状的无线电频率辉光放电光谱仪

摘要

A method and apparatus for analyzing solid sample materials (62) mounted externally to the apparatus is provided wherein a low pressure glow discharge (64) is initiated by applying a radio frequency potential (99) to an integral, continuous solid sample (62) and an electrically grounded anode (68) in the presence of an inert gas, the glow discharge being maintained such that the inert gas is ionized and the ionized gas sputters sample material (62), the sputtered sample material then passing into an analyzer region (32) for analysis.
机译:提供了一种用于分析安装在设备外部的固体样品材料(62)的方法和设备,其中通过向整体连续的固体样品(62)施加射频电势(99)来启动低压辉光放电(64)。在惰性气体存在下的电接地阳极(68),维持辉光放电,使惰性气体被离子化,而离子化的气体溅射样品材料(62),然后溅射的样品材料进入分析仪区域(32) )进行分析。

著录项

  • 公开/公告号WO9206487A1

    专利类型

  • 公开/公告日1992-04-16

    原文格式PDF

  • 申请/专利权人 CLEMSON UNIVERSITY;

    申请/专利号WO1991US07178

  • 发明设计人 MARCUS R. KENNETH;

    申请日1991-09-30

  • 分类号G01N21/67;H01J49/04;H01J49/10;H01J49/14;

  • 国家 WO

  • 入库时间 2022-08-22 05:31:05

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