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Device for radio frequency powered glow discharge spectrometry with external sample mount geometry
Device for radio frequency powered glow discharge spectrometry with external sample mount geometry
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机译:具有外部样品架几何形状的射频辉光放电光谱仪
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摘要
A method and apparatus for analyzing solid sample materials mounted externally to the apparatus is provided wherein a low pressure glow discharge is initiated by applying a radio frequency potential to an integral, continuous solid sample and an electrically grounded anode in the presence of an inert gas, the glow discharge being maintained such that the inert gas is ionized and the ionized gas sputters sample material, the sputtered sample material then passing into an analyzer region for analysis.
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