An angle measuring interferometer comprises a source (10) which emits a light beam (12) containing two orthogonally polarized components; a tilted shear plate (16) and a half-wave plate (29A) for converting said beam into two parallel beams (30, 33) with the same polarization; means including a polarizing beamsplitter (40), for causing each of the beams (30, 33) to be reflected once by each of two plane mirrors (71, 70) to produce two parallel output beams (60, 63) with the same polarization; a half-wave plate (29B) for converting said two beams into two output beams (62, 63) with orthogonal polarization, with the tilted shear plate (16) for converting said two output beams into a single output beam (80) in which the phase difference between the two components of said beam is proportional to the angle (0) between the two mirrors (70, 71); a photoelectric detector (83) to produce the measurement signal (85); and an electronic module (90) to indicate the phase difference which is proportional to the changes in the angular orientation between said two mirrors.
展开▼
