Modeling and Analysis of Phase Fluctuation in a High-Precision Roll Angle Measurement Based on a Heterodyne Interferometer

摘要

Heterodyne interferometry is a high-precision method applied in roll angle measurements. Phase metering is essential for high precision. During a high-precision measurement, a phase fluctuation appears even when the roll angle does not vary, which has never been analyzed before. Herein, the reason for the phase fluctuation is revealed, which results from the frequency-difference fluctuation and time difference between measurement and reference beams. A mathematical model of that phase-fluctuation mechanism is established, and that model provides a theoretical basis for analyzing and reducing the phase fluctuation. The impact that the main factors have on the phase metering is analyzed quantitatively, and experiments are carried out to validate the model. Finally, the phase fluctuation decreases to 0.02° by frequency reduction, which conversely verifies the theoretical model.