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A process for making a thin film metal alloy magnetic recording disk with a hydrogenated carbon overcoat
A process for making a thin film metal alloy magnetic recording disk with a hydrogenated carbon overcoat
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机译:具有氢化碳涂层的薄膜金属合金磁记录盘的制造方法
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摘要
A thin magnetic recording disk is manufactured by sputter deposition in an atmosphere consisting essentially of argon and hydrogen. A thin cobalt-based alloy magnetic film and a hydrogenated carbon overcoat are both formed in the same sputtering atmosphere by successive activation of a cobalt-based alloy target and a carbon target. The hydrogen present in the sputtering atmosphere has no adverse effect on the magnetic properties of the disk.
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