Aromatic diazonium salt, radiation sensitive composition containing the aromatic diazonium salt and method for formation of pattern using the radiation sensitive composition

摘要

Disclosed are an aromatic diazonium salt having a given composition, a radiation sensitive composition containing this aromatic diazonium salt and a method for forming a pattern using this radiation sensitive composition.;The aromatic diazonium salt can be prepared in an extremely high purity because no harmful metals are incorporated during preparation and fine patterns of various semiconductor devices can be formed in high accu­racy without troubles caused by the above metals.