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Thin film material for sensing or actuating devices and process for producing the same
Thin film material for sensing or actuating devices and process for producing the same
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机译:用于感测或致动装置的薄膜材料及其制造方法
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摘要
A thin layer material for sensors and actuators based on silicon and a process for the production of such a thin layer material are described. The material consists of silicon oxide nitride, which is applied by the process onto a suitable substrate material, preferably silicon, after which the substrate material is removed in certain regions. IMAGE
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