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Low sheet resistance diffused contacts to buried diffused resistors using isolation regions and buried layer
Low sheet resistance diffused contacts to buried diffused resistors using isolation regions and buried layer
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机译:使用隔离区和掩埋层的低薄层电阻扩散触点与掩埋扩散电阻器
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摘要
A device and method for using and making semiconductor device wherein leadouts and isolation regions are formed using the same process step. A buried layer is formed in the substrate of the semiconductor device which is used to isolate the leadouts from the grounded substrate. The isolation region and the leadouts are then diffused into the structure at the same time using the same diffusant.
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