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METHOD OF X-RAY DIFFRACTION SURVEY OF POLYCRYSTAL MATERIALS
METHOD OF X-RAY DIFFRACTION SURVEY OF POLYCRYSTAL MATERIALS
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机译:多晶硅材料的X射线衍射测量方法
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摘要
the invention u043eu0442u043du043eu0441u0438u0442u0441u00a0 to study physical, chemical properties by means of x-ray diffraction, in particular to u0440u0435u043du0442u0433u0435u043du043eu0430u043du0430u043bu0438u0437u0443 thin u043fu043eu043bu0438u043au0440u0438u0441u0442u0430u043b u043bu0438u0447u0435u0441u043au0438u0445 films and surface layers. the purpose is to improve the effectiveness of u0438u0437u043eu0431u0440u0435u0442u0435u043du0438u00a0 u0440u0435u043du0442u0433u0435u043du043eu0441u044au0435u043cu043au0438 thin surface layers.a method u0434u0438u0444u0440u0430u043au0442u043eu043cu0435u0442u0440u0438u0447u0435u0441u043au043eu0439 surveying u043fu043eu043bu0438u043au0440u0438u0441u0442u0430u043bu043bu043eu0432, which rotate around the axis of a sample, the focusing u043eu043au0440u0443u0436u043du043eu0441u0442 u043fu0435u0440u043fu0435u043du0434u0438u043au0443u043bu00a0u0440u043du043eu0439 plane and, the're injecting him u0440u0430u0441u0445u043eu0434u00a0u0449u0438u043cu0441u00a0 beam of x-ray u0438u0437u043bu0443u0447u0435u043du0438u00a0 and u0434u0438u0444u0440u0430 - 1 u0442u0438u0440u043eu0432u0430u0432u0448u0438u0435 rays are u043fu0435u0440u0435u043cu0435u0449u0430u044eu0449u0438u043cu0441u00a0 detector, to which a priya u043cu043du0430u00a0 slit.in the process of filming in u043fu043eu0441u0442u043eu00a0u043du043du044bu043c corner / between the plane model and collected radiation and reception slit detector together with him moving to p u0440u00a0u043cu043eu0439, u043fu0440u043eu0445u043eu0434u00a0u0449u0435u0439 through a source u0438u0437u043bu0443u0447u0435u043du0438u00a0 and u043eu0442u0441u0442u043eu00a0u0449u0435u0439 from the axis u0432u0440u0430u0449u0435u043du0438u00a0 model for u0440u0430u0441u0441u0442u043eu00a0u043du0438u0438 r, u043eu043fu0440u0435u0434u0435u043bu00a0u0435u043cu043eu043c formula r r sin / 9, where r is u0440u0430u0441u0441u0442u043eu00a0u043du0438u0435 from the axis at u0440u0430u0449u0435u043du0438u00a0 model to focus the source u0438u0437u043bu0443u0447u0435u043du0438u00a0. 1 il. yu
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