INTERFEROMETER FOR CHECKING PLANENESS OF REFLECTING SURFACES

摘要

the invention u043eu0442u043du043eu0441u0438u0442u0441u00a0 to measuring technology. the purpose of u0438u0437u043eu0431u0440u0435u0442u0435u043du0438u00a0 - increased reliability u043au043eu043du0442u0440u043eu043bu00a0 and extension of the u0438u0441u043fu043eu043bu044cu0437u043eu0432u0430u043du0438u00a0. the beam of light from a laser 1 u0440u0430u0441u0448u0438u0440u00a0u0435u0442u0441u00a0 u043cu0438u043au0440u043eu043eu0431u044au0435u043au0442u0438u0432u043eu043c 2 and enters a lens 3, located on the u0444u043eu043au0443u0441u043du043eu043c u0440u0430u0441u0441u0442u043eu00a0u043du0438u0438 from u043cu0438u043au0440u043eu043eu0431u044au0435u043au0442u0438u0432u0430 2, and u043au043eu043bu043bu0438u043cu0438u0440u0443u0435u0442u0441u00a0. a beam of light from the lens 3 is at a right angle and at the u0438u0441u0441u043bu0435u0434u0443u0435u043cu0443u044e surface 8.radiation reflected from the surface 8 which is a part u043eu0442u0440u0430u0436u0430u0435u0442u0441u00a0 partially u0440u0430u0441u0441u0435u0438u0432u0430u0435u0442u0441u00a0 on u0448u0435u0440u043eu0445u043eu0432u0430u0442u043eu0441u0442u00a0u0445 surface 8 is put into a second lens 4 located on the axis lying in the plane of u043fu0430u0434u0435u043du0438u00a0 and directed at an angle equal to a surface.after u043fu0440u043eu0445u043eu0436u0434u0435u043du0438u00a0 reflected from the surface of the lens 4 u0437u0435u0440u043au0430u043bu044cu043du0430u00a0 u0438u0437u043bu0443u0447u0435u043du0438u00a0 u0441u0445u043eu0434u0438u0442u0441u00a0 and hits the cantwell diaphragm 5 is located in the focus of the u043au043eu0442u043eu0440u0430u00a0 u0435u043au0442u0438u0432u0430 4, and u043eu0441u0443u0449u0435u0441u0442u0432u043bu00a0u0435u0442 spatial filtering along the u043du0430u043fu0440u0430u0432u043bu0435u043du0438u00a0, u043fu0435u0440u043fu0435u043du0434u0438u043au0443u043bu00a0u0440u043du043eu0433u043e slit diaphragm 5.u043eu0442u0444u0438u043bu044cu0442u0440u043eu0432u0430u043du043du043eu0435 one area radiation falls on the diffraction grating 6, u043au043eu0442u043eu0440u0430u00a0 u0440u0430u0437u0434u0435u043bu00a0u0435u0442's radiation on the amplitude, u0444u043eu0440u043cu0438u0440u0443u00a0 two identical light u043eu0432u044bu0445 flow, several replacement and u043du0430u043au043bu043eu043du0435u043du043du044bu0445 relative to each other.u0434u0438u0444u0440u0430u043au0446u0438u043eu043du043du043eu0439 bars 6 formed of two identical superimposed wave front with a speckle pattern structure, u0432u044bu0442u00a0u043du0443u0442u0443u044e in the direction u043fu0435u0440u043fu0435u043du0434u0438u043au0443u043bu00a0u0440u043du043eu043c slits u0434u0438u0430u0444 u0440u0430u0433u043cu044b 5 form a butt - u0440u0435u0447u043du043e - u0441u0434u0432u0438u0433u043eu0432u0443u044e u0438u043du0442u0435u0440u0444u0435u0440u043eu0433u0440u0430u043cu043cu0443, of which u0432u044bu0442u00a0u043du0443u0442u044b along the u043du0430u043fu0440u0430u0432u043bu0435u043du0438u00a0 slit diaphragm. 2). (l to xi on on on