process for the fabrication of microstructures with high aspect ratio by erosionslithographie

摘要

technical problem $a famous erosionslithographie with abrasive powders on brittle materials and medium aspektverhu00e4ltnisse (1) limited.$a $a in the solution field of editable materials can greatly increase and the achievable aspect ratio will be substantially increased, if the particles of abrasive powder droplets of a liquid, the material physically or chemically dissolves, applied will en.$a $a microstructures of any kind, in particular ceramic formku00f6rper, insulators and metallic and ferromagnetic components in miniaturschaltungen.