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Methods using lasers to produce deposition of diamond thin films on substrates
Methods using lasers to produce deposition of diamond thin films on substrates
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机译:使用激光在基材上沉积金刚石薄膜的方法
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摘要
Infrared lasers are used to deposit diamond thin films onto a substrate. In one embodiment, the deposition of the film is from a gas mixture of CH.sub.4 and H.sub.2 that is introduced into a chemical vapor deposition chamber and caused to flow over the surface of the substrate to be coated while the laser is directed onto the surface. In another embodiment, pure carbon in the form of soot is delivered onto the surface to be coated and the laser beam is directed onto the surface in an atmosphere that prevents the carbon from being burned to CO.sub.2.
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