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Methods using lasers to produce deposition of diamond thin films on substrates

机译:使用激光在基材上沉积金刚石薄膜的方法

摘要

Infrared lasers are used to deposit diamond thin films onto a substrate. In one embodiment, the deposition of the film is from a gas mixture of CH.sub.4 and H.sub.2 that is introduced into a chemical vapor deposition chamber and caused to flow over the surface of the substrate to be coated while the laser is directed onto the surface. In another embodiment, pure carbon in the form of soot is delivered onto the surface to be coated and the laser beam is directed onto the surface in an atmosphere that prevents the carbon from being burned to CO.sub.2.
机译:红外激光用于将金刚石薄膜沉积到基板上。在一个实施例中,膜的沉积来自CH 4和H 2的气体混合物,该气体混合物被引入到化学气相沉积室中,并使其流过待涂覆基底的表面,而激光直接照射到表面上。在另一个实施例中,烟灰形式的纯碳被输送到要涂覆的表面上,并且在防止碳被燃烧成CO 2的气氛中将激光束引导到表面上。

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