HIGH-FREQUENCY CHARACTERISTIC VALUE MEASURING METHOD FOR SIGNAL LINE OF SEMICONDUCTOR STORING DEVICE AND HIGH-FREQUENCY CHARACTERISTIC VALUE MEASURING DEVICE USED FOR IT

摘要

PURPOSE: To accurately estimate an actual high-frequency characteristic value of a signal line of a semiconductor storing device. ;CONSTITUTION: Inner ends of two sub-signal lines 400 of plural pairs of a plurality of the sub-signal lines 400 which have the same transmission-path structure, the same shape and the same quality as a plurality of signal lines provided at a device body of a semiconductor storing device are connected to each other in series with a plurality of connecting lines 600 which have almost the same transmission-path structure and the same quality as the inner ends of those sub-signal lines to form a first tool to be measured, and a high-frequency characteristic value of each of the plural pairs of the sub-signal lines 400 is measured. At the same time, a second tool to be measured is formed having a plurality of sub-connecting lines 600a which have the same transmission-path structure, the same shape and the same quality as the plural connecting lines 600 connecting the inner ends of the plural pairs of the sub-signal lines 400 to each other, and the high-frequency characteristic value of each of the plural sub-connecting lines 600a is measured. Next, based on those high-frequency characteristic values, an actual high-frequency characteristic value of the signal line of the semiconductor storing device is estimated.;COPYRIGHT: (C)1993,JPO&Japio