METHOD AND DEVICE FOR MANUFACTURING HIGH CONDUCTIVE TRANSPARENT FILM OF INDIUM OXIDE, TO WHICH TIN AND FLUORINE ARE DOPED, BY APCVD

摘要

PURPOSE: To form indium oxide film having excellent electric conductivity and visible light transparency by continuously transporting gases to plural shut off chambers from an in-chamber atmosphere and executing heating, preprocessing and film forming. ;CONSTITUTION: Substrates placed on a transporting machine belt 12 are introduced into a muffle 17 through a nitrogen curtain 18 for wiping and are heated by a heater 26 in an enclosure. The substrates are introduced through the next curtain 18 into a fore process chamber 28 where SiO₂ films are applied thereon. Further, the substrates are introduced into a main reaction chamber 30 shut off by a curtain 18 where fluorine-contg. indium tin oxide films are applied on the substrates. Further, conductive films are applied on the substrates in a post process chamber 32. The substrates are led out through the curtain 18 and are cooled as the substrates approach a removal position 16.;COPYRIGHT: (C)1992,JPO