METHOD FOR INSPECTING SURFACE PHYSICAL PROPERTIES OF SOLID AND SCANNING CLUSTER MICROSCOPE

摘要

PURPOSE: To inspect the surface physical properties of a solid by opposing a probe to the surface of a sample to be inspected in a contact state and collectively irradiating the contact part with low speed electron beam to generate a positronium cluster and sorting inducted annihilation gamma rays on the basis of energy to detect the same. ;CONSTITUTION: The electron withdrawn from a microtron 1 is converged by a quadripole magnet system 2 to be projected on the electron/positron converter 3 of a tantalum plate to be converted to a positron of a white spectrum. Positron beam is converged by the magnet system 2 to irradiate the moderator 4 of a heated tungsten plate. Low speed positron is emitted from the moderator 4 to irradiate the surface of the sample 8 opposed to a scanning probe 7 by a deflecting element 6 through an accelerating and converging element 5 for amplifying brightness. The considerable part of the irradiated positron gathers in the form of a surface positron to the fine space between a probe 7 and the surface of the sample 8 to be bonded to electron to become a positronium cluster PSn. The cluster PSn is directly induced and annihilated to be detected as induced gamma rays 9 by a scintillation simultaneous detector 10.;COPYRIGHT: (C)1993,JPO&Japio