MANUFACTURE OF FRESNEL ZONE PLATE FOR FOCUSING X-RAY

摘要

PURPOSE:To obtain a method for manufacturing a Fresnel zone plate, which has high resolution and can supply a large quantity of the plates in the method for manufacturing the plate as an X-ray lens. CONSTITUTION:When a concentrically circular pattern for transferring is formed on a photomask, a shifter pattern 11 is formed on the photomask. The pattern 11 is formed at light transmission parts disposed at every other light transmission parts disposed between the patterns. The pattern 11 is formed of a material for inverting a phase of an exposure light at 180 degrees. Since concentrically circular pattern images are so focused that the adjacent images are separated, a Fresnel zone plate having high resolution can be manufactured by a light transferring method.