RESIN BOND GRINDING WHEEL FOR METAL PRECISION GRINDING

摘要

PURPOSE: To improve surface roughness by containing the specified volume% of abrasive grains of carbonate in a resin bond grinding wheel for a semi- conductive wafer and the like. ;CONSTITUTION: A resin bond grinding wheel for metal precision grinding includes at least 30 volume% of abrasive grains of one or more kinds of carbonate, for example, Li₂CO₃, in alkaline metal or alkaline earth metal. The average diameter of an abrasive grain of carbonate is set to 50μm or less. As the resin, phenol, epoxide, polyimide, polystyrene, or polyethylene is used.;COPYRIGHT: (C)1993,JPO&Japio