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PROCESS FOR CLEANING PRECISION OPTICS OR OPTICAL ASSEMBLIES WITHOUT PRODUCING EMISSIONS, ESPECIALLY CFCs
PROCESS FOR CLEANING PRECISION OPTICS OR OPTICAL ASSEMBLIES WITHOUT PRODUCING EMISSIONS, ESPECIALLY CFCs
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机译:在不产生排放物(尤其是氟氯化碳)的情况下清洁精密光学或光学组件的过程
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摘要
Without a precision optical elements emissions cleaning process comprises the following steps: (a) a pretreatment which comprises cleaning in a bath containing buffered tap water, to which is added surfactants as an wetting agent, the bath being circulated and finely filtered, the cleaning being accompanied by exposure to ultrasound, preferably at frequencies and varying amplitudes; the optical elements are then rinsed with buffered tap water without wetting agents, with exposure to ultrasound, while fresh water is finely filtered; a new cleaning and rinsing again follow, and a rinse with water buffered deionized, with exposure to ultrasound and stirring with deionized water at the same time that the bath is finely filtered; (B) decomposition of organic impurities and residues of surfactants to transform them into CO2 by exposure to short-wave UV radiation or highly accelerated electrons or a glow discharge in an atmosphere of oxygen pressure or under a pressure of up to 5 bar or in an ozone atmosphere pressure or under a pressure of up to 2 bars; (C) control interfaces of glass optical elements with respect to reactions with organic radicals, decomposition reactions at the glass surface or changes in the surface geometry; (D) a main processing consisting of the steps of: expelling water to the glass surface, for example by means of non-volatile hydrophobic reactive substances or non-volatile hydrophobic substances; sealing the surface by forming a film by exposure to UV or electron rays and surface coating, while the surface sealing layer is decomposed into a metal oxide or glow discharge is activated by corona discharge. The optical component according to this cleaned
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