Permanent magnet magnetic circuit and magnetron plasma processing device using it

摘要

The permanent magnet magnetic circuit has a main magnet block 1 having a pair of opposing outer surfaces. On each of these outer surfaces, a pair of main magnetic poles 11A and 11B having mutually opposite polarities are disposed. The main magnet block 1 has a groove portion formed between both outer surfaces. The groove portion has a pair of inner surfaces corresponding to a pair of outer surfaces, And a pair of compensating magnetic poles 12A and 12B for controlling the direction of the magnetic field directed to the magnetic field. And a pair of adjusting magnet blocks 3A and 3B for adjusting a magnetic field from one main magnetic pole to the other main magnetic pole.