PERMANENT MAGNET MAGNETIC CIRCUIT AND MAGNETRON PLASMA PROCESSING APPARATUS

摘要

The permanent magnet magnetic circuit has a main magnet block 1 having a pair of opposing outer surfaces. On each of these outer surfaces, a pair of main magnetic poles 11A and 11B which are opposite to each other are located. The main magnet block 1 has a groove portion formed between both outer surfaces, and the groove portion has a pair of inner surfaces corresponding to the pair of outer surfaces, and the main magnetic poles from one main magnetic pole to the other main magnetic pole so as to correspond to the main magnetic poles having opposite polarities on their inner surfaces, respectively. It has a pair of compensating magnetic poles 12A and 12B for controlling the vector direction of the magnetic field directed toward the. In addition, the inner surface of the pair has a pair of adjustment magnet blocks 3A and 3B for adjusting the magnetic field from one main magnetic pole to the other main magnetic pole.